Corona and silent mode electrical discharges were applied as a means of activation in CVD reactions to prepare ultrafine ceramic particles. It was shown that various ultrafine ceramic particles were easily synthesized in a simple reactor by discharges at room temperature and atmospheric pressure. The basic properties of the CVD reaction excited by electrical discharges were experimentally studied.
The proposed reaction method was applied to ceramic membrane formation and to surface-modified particle formation. A ceramic membrane which has a submicron pore and a large porosity, was formed by sintering the deposited particle layer. Surface-modified ultrafine ceramic particles which have various organic groups at the surface can be directly prepared from the material.