To analyze shape, deformation and stress of objects, interference methods and grid projection methods are used. The positions of the fringe lines or grid lines provides the information of the shape etc. In this study, we produced a hardware system for the phase-shifting scanning moire method. This hardware system can take images of shape and deformation distributions of an object in real-time. We developed an automatic phase unwrapping method for grid projecting method. We developed an automatic phase analysis method for reference planes to perform an accurate shape measurement. We also developed the acoustoelastic velocity-ratio method and the spectroscopy method. So, the base of an automated system for measurement and analysis of shape, deformation, stress, strain and motion, and a malfunction detection system were developped.